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27-VCD.series-(Diaphragm.Valves)
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Features
Compact designed body with minimal dead space
Body materials comply with SEMI F-20, “Specification 316LSS
Materials for UHP (Ultra High Purity) Grade Semiconductor
Manufacturing Applications”
Maximum flow capacity
Minimal particle generation
Minimal contributions of moisture, oxygen and hydrocarbon
with Uni-Lok’s own special cleaning process in a certified clean
room
Excellent finish level of wetted areas with Uni-Lok’s own
electro polish process
Elgiloy
Compact designed body with minimal dead space
Body materials comply with SEMI F-20, “Specification 316LSS
Materials for UHP (Ultra High Purity) Grade Semiconductor
Manufacturing Applications”
Maximum flow capacity
Minimal particle generation
Minimal contributions of moisture, oxygen and hydrocarbon
with Uni-Lok’s own special cleaning process in a certified clean
room
Excellent finish level of wetted areas with Uni-Lok’s own
electro polish process
Elgiloy
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Diaphragm.Valves